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Study on the fabrication of low temperature a-Si:H TFT for flexible display

Abstract Recently, a-Si:H TFT based liquid-crystal display has encroached on the territory of the cathode ray tubes. There is a tendency to fabricate the active matrix LCD on the plastic or flexible substrates. Instead of glass, flexible substrates will make the application of TFT-LCD extensive due to the several advantages: i.e. ultra-slim, light-weight and unbreakable, etc. Nevertheless, the limitation of process temperature for the low-melting substrates is an important issue. In this thesis, the feasibility of a-Si TFT devices fabricated on flexible substrates by using two different technologies have been evaluated. First, a-Si TFT devices were fabricated on glass at 150¢Jsuccessfully and the characteristics of films deposited at lowtemperature have been studied sequentially. For improving the adhesion between organic and inorganic layers and protecting substrate against water or gas during processes, several hot coating layers were investigated. With hot coating layer be introduced, glass was substituted by plastic substrates. We chose PES as the flexible substrate from several candidates due to better optical transmittance and good thermal stability below 200¢J. After direct fabrication on flexible substrate, the stability of electronic characteristics were been investigated with bending examination.
In addition, TFT devices were successfully separated from glass and transferred to flexible substrates such as PES or metal foil. Using this technology, temperature limitation has been circumvented and TFT devices still exhibit good electronic characteristic. Furthermore, the bending measurements have been also applied to devices.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0712105-170710
Date12 July 2005
CreatorsChen, Liang-lu
ContributorsPo-Tsun Liu, An-Kuo Chu, Ting-Chang Chang
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageEnglish
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0712105-170710
Rightsnot_available, Copyright information available at source archive

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