Structure evolution, properties, and application of alumina films deposited by PECVD /

Description

Zugl.: Aachen, Techn. Hochsch., 2005.

Links & Downloads

1. http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&doc_number=014643764&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA

Tags

Aluminiumoxide

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/76773930
Date	January 2005
Creators	Kurapov, Denis.
Publisher	Aachen : Shaker,
Source Sets	OCLC
Language	English
Detected Language	English