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The effect of fluorine in low thermal budget polysilicon emitters for SiGe heterojunction bipolar transistors

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:287345
Date January 1999
CreatorsSchiz, Frank Jochen Wilhelm
PublisherUniversity of Southampton
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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