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Optical Application of Anodic Aluminum Oxide

Abstract
The AAO membrane with nanopore arrays were fabricated by anodizing highly pure aluminum foils (99.9995%) in electrolyte under steady voltage. Pore diameter can be controlled by different anodic voltage(from 30 to 50 V) and electrolyte, on the other hand, thickness is proportioned to anodizing time , and interpore could follow this rule(a = 15.4+2.63¡Ñv) , and minimum radius of pore could reach 15nm . The XRD spectra of AAO without and with annealing, both showed the diffraction peaks of (311)¡B(400)¡B(440), corresponding to the £^-Al2O3 phase . Before fabricating AAO, we would polish under low temperature and then clean alumina foil in order to reduce surface roughness that is good for better order and regular.
Through the use of porous anodic alumina masks, Au nanodot arrays deposited on Si by E-gun with AAO mask. Subsequently, the AAO mask was removed by H3PO4. Under the same procedure, we can fabricate 80nm of the diameter of pore and apply this mask on wafer of laser constructure . Because of regular hexagonal pore array, we may get the photonic crystal effect. During PL experiment, we got the result that AAO could increase light extraction of quantum dot from C237 wafer and controlled emission peak from C238 and C196 wafer and position of peak could shift to 1140nm. We hope nanodot array on wafer of laser structure could control emission peak.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0729108-162413
Date29 July 2008
CreatorsChien, Wei-han
ContributorsMin-Hsiung Shih, Tsung-Hsien Lin, Chin-Ping Yu, Tsong-Sheng Lay, Hao-Chung Kuo
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0729108-162413
Rightsnot_available, Copyright information available at source archive

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