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Single-stage large-angle beam steering optical phased array on silicon nanomembrane

In this paper, we present the results of the design and fabrication of a 12 channel nano-membrane-based optical phased array that allows for large angle beam steering operating at wavelength=1.55µm. Our device is fabricated on silicon-on-insulator using standard CMOS process. By implementing unequally spaced waveguide array elements, we can relax the half-wavelength spacing requirement for large angle beam steering, thereby avoiding the optical coupling between adjacent waveguides and reducing the side-lobe-level of the array radiation pattern. 1D beam steering of tranverse-electric polarized single mode light is designed to be achieved thermo-optically through the use of thin film metal phase shifters. / text

Identiferoai:union.ndltd.org:UTEXAS/oai:repositories.lib.utexas.edu:2152/ETD-UT-2010-05-1376
Date01 November 2010
CreatorsKwong, David Nien
Source SetsUniversity of Texas
LanguageEnglish
Detected LanguageEnglish
Typethesis
Formatapplication/pdf

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