Hybrid waveguides based on antiresonant reflecting optical waveguide (ARROW) structure on Si substrates is investigated. The core layer of the waveguide is separated from the Si substrate by interference cladding which consists of a high index first cladding layer and a low index second cladding layer. The Ta2O5 first cladding layer was grown by rf magnetron sputtering system. The SiON second cladding layer was deposited by plasma-enhanced chemical vapor deposition (PECVD) based on the reaction of SiH4/N2O mixtures. Typical propagation losses of the waveguides using this SiON material system are less than 0.15 dB/cm. The high quality cladding layers are prepared to form the Fabry-Perot cavities to ensure low loss operation of the ARROW device at antiresonant conditions.
Two methods were proposed to demonstrate the enormous applications of hybrid ARROW waveguides. First, polyimide/Ta2O5/SiON ARROWs were fabricated to achieve high extinction ratio waveguide polarizers. This is accomplished by tuning the operating point of the TM0 mode from antiresonant condition toward high-order antiresonance of the second cladding layer utilizing birefringence of the waveguide core. The measured extinction ratio and insertion loss of a 2-cm-long ARROW polarizer are 40 dB and 2.2 dB, respectively.
In addition, the temperature dependence of refractive index of organic-inorganic sol-gel glasses was measured by Mach-Zehnder interferometry using the ARROW waveguides. The Sol-gel/Ta2O5/SiO2 ARROWs were fabricated to characterize index-to-temperature coefficients (dn/dT) of the sol-gel glasses because the optical confinement factor of the ARROW is very close to 1. The measured index-to-temperature coefficients of the sol-gel glasses with different compositions are negative and are on the order of 10-4.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0614105-114342 |
| Date | 14 June 2005 |
| Creators | Lin, Jing-Yuan |
| Contributors | Chun-Hsun Chu, Ann-Kuo Chu, San-Liang Lee, Hung-Wen Chang, Ju-Tah Tung, Daniel Yen Chu |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0614105-114342 |
| Rights | withheld, Copyright information available at source archive |
Page generated in 0.0019 seconds