Caracterização óptica de filmes finos de NbOx obtidos por sputtering reativo / Optical characterization of NbOx thin films obtained by reactive sputtering

Description

Submitted by Maria Eneide de Souza Araujo ([e-mail]) on 2015-02-20T13:22:28Z
No. of bitstreams: 0 / Made available in DSpace on 2015-02-20T13:22:28Z (GMT). No. of bitstreams: 0 / Dissertação (Mestrado em Tecnologia Nuclear) / IPEN/D / Instituto de Pesquisas Energeticas e Nucleares - IPEN-CNEN/SP

Links & Downloads

1. http://repositorio.ipen.br:8080/xmlui/handle/123456789/23486

Tags

THIN FILMS

NIOBIUM OXIDES

SPUTTERING

REFRACTIVE INDEX

OPTICAL PROPERTIES

CHEMICAL PROPERTIES

CORROSION RESISTANCE

SILICON

BORON SILICATES

ELLIPSOMETRY

RUTHERFORD SCATTERING

Additional Fields

Identifer	oai:union.ndltd.org:IBICT/oai:10.40.40.102:123456789/23486
Date	20 February 2015
Creators	SCHEIDT, GUILHERME
Contributors	Orientador: Marina Fuser Pillis
Source Sets	IBICT Brazilian ETDs
Detected Language	English
Type	info:eu-repo/semantics/publishedVersion, info:eu-repo/semantics/masterThesis
Format	73
Source	reponame:Repositório Institucional do IPEN, instname:Instituto de Pesquisas Energéticas e Nucleares, instacron:IPEN
Coverage	N
Rights	info:eu-repo/semantics/openAccess