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Characterization of High-K gate dielectrics based on HfO2 and TiO2 for CMOs application

Thesis (Ph.D.)--North Carolina State University. / Includes vita. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/182728620
Date January 2007
CreatorsLee, Sanghyun.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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