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Spectroscopic studies of the reactive ion etching of GaAs in CC12̲F2̲ and CC13̲F plasmas
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Links & Downloads
http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.234592
Tags
621.31042
Components
Additional Fields
Identifer
oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:234592
Date
January 1989
Creators
Wade, I. T.
Publisher
University of Bristol
Source Sets
Ethos UK
Detected Language
English
Type
Electronic Thesis or Dissertation
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