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Spectroscopic studies of the reactive ion etching of GaAs in CC12̲F2̲ and CC13̲F plasmas

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.234592

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:234592
Date	January 1989
Creators	Wade, I. T.
Publisher	University of Bristol
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation