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The technology and characterisation of enhanced polysilicon interconnects for integrated circuits

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.254312

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:254312
Date	January 1986
Creators	Mitchell, Samuel John Neil
Publisher	Queen's University Belfast
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation