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Interdigitated metal-semiconductor-metal (MSM) photodetector on III-V compound semiconductor materials.

by Hiu-suen Choy. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1995. / Includes bibliographical references (leaves [124]-131). / Acknowledgements / Abstract / Chapter Chapter 1 --- Introduction --- p.1-1 / Chapter Chapter 2 --- Basic Theory for MSM Photodetectors --- p.2-1 / Chapter 2.1 --- Schottky-Mott Theory for Ideal metal-Semiconductor Contact --- p.2-1 / Chapter 2.2 --- Modifications to Schottky-Mott Theory for Practical Metal Semiconductor Contact --- p.2-4 / Chapter 2.3 --- Energy Band of Metal-semiconductor-metal (MSM) Structures --- p.2-6 / Chapter 2.4 --- Dark Current Voltage Characteristics for MSM Structure --- p.2-12 / Chapter 2.5 --- Capacitance for Interdigitated MSM Photodetectors --- p.2-16 / Chapter 2.6 --- Basic mechanism of the MSM Photodetector --- p.2-19 / Chapter 2.7 --- DC Responsity and Quantum Efficiency of the Interdigitated MSM Photodetector --- p.2-20 / Chapter 2.8 --- Speed Performance of the Interdigitated MSM Photodetector --- p.2-21 / Chapter Chapter 3 --- Device Fabrication and Packaging --- p.3-1 / Chapter 3.1 --- Metallization Pattern --- p.3-1 / Chapter 3.2 --- Device Fabrication --- p.3-7 / Chapter 3.3 --- Device Packaging --- p.3-8 / Chapter Chapter 4 --- Experimental Description --- p.4-1 / Chapter 4.1 --- Experimental Procedures --- p.4-1 / Chapter 4.2 --- Equipment Description --- p.4-3 / Chapter Chapter 5 --- 1.3μm In0.53Ga0.47As Metal-Semiconductor-Metal Photodetector Grown by Low-Pressure MOCVD Using Tertiarybutylarsine --- p.5-1 / Chapter 5.1 --- General Description --- p.5-1 / Chapter 5.2 --- Structure of the Photodetector --- p.5-2 / Chapter 5.3 --- Experimental Results --- p.5-6 / Chapter 5.4 --- Data Analysis and Discussion --- p.5-14 / Chapter 5.5 --- Summary --- p.5-24 / Chapter Chapter 6 --- The Performance of 0.85μm Semi-Insulated GaAs MSM Photodetector with Different Interdigitated Spacings --- p.6-1 / Chapter 6.1 --- General Description --- p.6-1 / Chapter 6.2 --- Experimental Results --- p.6-2 / Chapter 6.3 --- Data Analysis and Discussion --- p.6-17 / Chapter 6.4 --- Summary --- p.6-27 / Chapter Chapter 7 --- Optical Control of Polarity in Short Electrical Pulses Generated from Coplanar Waveguide MSM Photodetectors --- p.7-1 / Chapter 7.1 --- General Description --- p.7-1 / Chapter 7.2 --- "Structure, Fabrication and Experimental Set-up" --- p.7-1 / Chapter 7.3 --- Experimental Results --- p.7-4 / Chapter 7.4 --- Data Analysis and Discussion --- p.7-11 / Chapter 7.5 --- Applications --- p.7-18 / Chapter Chapter 8 --- Conclusion --- p.8-1 / References / Publications

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_320546
Date January 1995
ContributorsChoy, Hiu-suen., Chinese University of Hong Kong Graduate School. Division of Electronic Engineering.
PublisherChinese University of Hong Kong
Source SetsThe Chinese University of Hong Kong
LanguageEnglish
Detected LanguageEnglish
TypeText, bibliography
Formatprint, [133] leaves : ill. ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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