Hydrogen atom and argon ion reactions for removing hydrocarbon adsorbates and contamination from silicon surfaces /

Description

Thesis (Ph. D.)--University of Texas at Austin, 1998. / Vita. Includes bibliographical references (leaves 167-178). Available also in a digital version from Dissertation Abstracts.

Links & Downloads

1. http://wwwlib.umi.com/cr/utexas/main

Tags

Silicon Contamination control.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/44049246
Date	January 1998
Creators	Sampson, Gareth Milo,
Source Sets	OCLC
Language	English
Detected Language	English
Source	Digital version accessible at: