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Preparation and characterization of SrTiO₃ thin films by modified metalorganic decomposition technique.

by Ng Tsz Bun. / Thesis (M.Phil.)--Chinese University of Hong Kong, 2002. / Includes bibliographical references. / Abstracts in English and Chinese. / Abstract --- p.i / Acknowledgements --- p.iv / Table of contents --- p.v / List of Figure captions --- p.vii / List of Table captions --- p.xii / Chapter Chapter 1 --- INTRODUCTION --- p.1 / Chapter 1.1 --- Sol-gel synthesis / Chapter 1.2 --- Ceramic Structures / Chapter 1.3 --- Dielectric Behaviour / Chapter 1.4 --- Ferroelectricity and Piezoelectricity / Chapter 1.5 --- Metal-Insulator-Metal system / Chapter 1.6 --- Space Charge Limited Currents / Chapter Chapter 2 --- Sample Preparation and Characterisation Methods --- p.27 / Chapter 2.1 --- Preparation of Precursor Solution bya New Chemical Route / Chapter 2.2 --- Preparation of Precursor Solution for SrTi(1_x)Nbx03 Thin Films / Chapter 2.3 --- Sample Preparation / Chapter 2.4 --- Chemistry of the Sol-gel Process / Chapter 2.5 --- Rutherford Backscattering Spectrometry (RBS) / Chapter 2.6 --- X-ray Diffraction (XRD) / Chapter 2.7 --- X-ray Photoelectron Spectroscopy (XPS) / Chapter 2.8 --- Atom Force Microscopy (AFM) / Chapter 2.9 --- Transmission Electron Microscopy (TEM) / Chapter Chapter 3 --- Characterization of composition and thickness of SrTi03 thin Films --- p.48 / Chapter 3.1 --- Composition Characterization / Chapter 3.2 --- Thickness Characterization / Chapter Chapter 4 --- Structural Properties of STO Thin Films --- p.57 / Chapter 4.1 --- Effects of Annealing Method on STO Thin Film Structure / Chapter 4.2 --- Substrate Effects on Structure of STO Thin Films / Chapter 4.3 --- Effects of Si02 Buffer Layer on Structure of STO Thin Films / Chapter 4.4 --- Effects of STO Film Thickness on Structure of STO Thin Films / Chapter 4.5 --- Surface Morphology of STO Thin Films / Chapter Chapter 5 --- Electrical Characterization of STO Thin Films --- p.78 / Chapter 5.1 --- C-V characteristics / Chapter 5.2 --- I-V characteristics / Chapter Chapter 6 --- Effect of Niobium Doping on The STO Thin Films --- p.100 / Chapter Chapter 7 --- Conclusions and Future Work --- p.109 / Chapter 7.1 --- Conclusions / Chapter 7.2 --- Future Work / Publications --- p.112 / Appendix --- p.113 / Preparation of Cross-sectional TEM Specimen

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_324090
Date January 2002
ContributorsNg, Tsz Bun., Chinese University of Hong Kong Graduate School. Division of Electronic Engineering.
Source SetsThe Chinese University of Hong Kong
LanguageEnglish, Chinese
Detected LanguageEnglish
TypeText, bibliography
Formatprint, xiii, 117 leaves : ill. (some col.) ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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