Trapping of hydrogen in Hf-based high [kappa] dielectric thin films for advanced CMOS applications

Description

Thesis (Ph. D.)--University of North Texas, Dec., 2007. / Title from title page display. Includes bibliographical references.

Links & Downloads

1. http://digital.library.unt.edu/permalink/meta-dc-5114

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/231334498
Date	January 2007
Creators	Ukirde, Vaishali. El Bouanani, Mohamed,
Publisher	[Denton, Tex.] : University of North Texas,
Source Sets	OCLC
Language	English
Detected Language	English
Source	connect to online resource.