The growing demand for the Internet of Things (IoT) and Artificial Intelligence (AI) need high-speed commu-nication within short-range distances. In the Back-End-Of-Line (BEOL), Single-Mode Waveguide (SMW) with micro-mirror shows the promising application as an Optical Redistribution Layer (O-RDL) connecting photonic-chip at the interposer-level. The presented study shows the potential application of the 2-Photon-Polymerization (2PP) process for fabrication of out-of-plane coupling elements (micro-mirror) for SMW using low-loss Ormocer® hybrid polymers. This fabricated micro-mirror uses as a coupling element to connect the light from RDL to chips or for inter-layer connections at Interposer level. To evaluate the processing time, structural quality, and resolution of the printed micro-mirror, two types of lenses (63x and 25x) and Ormocer® polymers (OrmoComp and OrmoCore) were used. The optimization of the process flow for the micro-mirrors for SMW applications will be described in detail.
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:88021 |
| Date | 14 November 2023 |
| Creators | Mistry, Akash, Weyers, David, Nieweglowski, Krzysztof, Bock, Karlheinz |
| Publisher | IEEE |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | info:eu-repo/semantics/acceptedVersion, doc-type:conferenceObject, info:eu-repo/semantics/conferenceObject, doc-type:Text |
| Rights | info:eu-repo/semantics/openAccess |
| Relation | 978-1-6654-8947-8, 10.1109/ESTC55720.2022.9939534, info:eu-repo/grantAgreement/Bundesministerium für Bildung und Forschung/Vertrauenswürdige Elektronik (ZEUS)/16ME0315//Heterogene Photonik Elektronik Plattform für vertrauenswürdige quelloffene Prozessoren/SILHOUETTE |
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