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Etch products dynamics of polyphenylene oxide laminates using a CF���/O���/Ar downstream microwave plasma

Graduation date: 1999

Identiferoai:union.ndltd.org:ORGSU/oai:ir.library.oregonstate.edu:1957/33505
Date04 March 1999
CreatorsHsu, Chia-Chang
ContributorsKoretsky, Milo D.
Source SetsOregon State University
Languageen_US
Detected LanguageEnglish
TypeThesis/Dissertation

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