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Spectroscopic studies of etching gases and microwave diagnostics of plasmas related to the semiconductor industry.

Thesis (Ph. D.)--Open University.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/496984677
Date January 2006
CreatorsVas̆eková, Eva.
Publishern.p.,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourcePhD Thesis

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