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Surface science studies on the interaction of nitrogen trifluoride ion beams and plasmas with silicon /

Thesis (Ph. D.)--University of Washington, 1999. / Vita. Includes bibliographical references (leaves 160-172).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/42584344
Date January 1999
CreatorsLittle, Thomas William,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeTheses
SourceConnect to this title online; UW restricted

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