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Infrared characterization of SiN films on Si for high speed electronics applications /

Thesis (M.S. in Applied Physics)--Naval Postgraduate School, December 2004. / Thesis advisor(s): Gamani Karunasiri, Ronald E. Brown. Includes bibliographical references (p. 33). Also available online.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/57985060
Date January 2004
CreatorsTellez, Galdino Mejia.
PublisherMonterey, Calif. : Springfield, Va. : Naval Postgraduate School ; Available from National Technical Information Service,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
Source(517 KB)

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