The benefit of the super-junction (SJ) technique and the use of a floating P layer for low voltage (30 V) laterally double-diffused metal oxide semiconductor (LDMOS) transistors are investigated in this thesis using Sentaurus TCAD simulation software. Optimizations to the SJ LDMOS were attempted such as adding a buffer layer to the device, but simulation and theoretical evidence point out that the benefits of the SJ technique are marginal at the 30 V application. A replacement for the SJ technique was sought, the floating P structure proved to be a good solution at the low voltage range due to its simpler cost effective process and performance gains achieved with optimization. A new idea of combining the floating P layer with shallow trench isolation is simulated yielding a low figure of merit (on state resistance x gate charge) of 5.93 mΩ-nC.
| Identifer | oai:union.ndltd.org:ucf.edu/oai:stars.library.ucf.edu:etd-6750 |
| Date | 01 January 2017 |
| Creators | Salih, Aiman |
| Publisher | University of Central Florida |
| Source Sets | University of Central Florida |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | Electronic Theses and Dissertations |
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