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Feedback Controlled High Frequency Electrochemical Micromachining

Microsystem and integrated circuitry components are mostly manufactured using
semiconductor technologies. Fabrication using high strength metals, for demanding
aerospace, mechanical, or biomedical applications, requires novel technologies which
are different from those for silicon. A promising mass production method for
micro/meso scale components is electrochemical micromachining.
The complex system, however, requires high precision mechanical fixtures and
sophisticated instrumentation for proper process control. This study presents an
electrochemical micromachining system with a closed-loop feedback control
programmed using a conditional binary logic approach.
The closed-loop control is realized using electrical current as the dynamic
feedback signal. The control system improves material removal rate by 250% through
optimizing inter electrode gap and provides robust automation reducing machining
variation by 88%. The new system evokes production of higher quality
microcomponents. Workpiece damage is reduced by 97% and increased feature
sharpness is observed.

Identiferoai:union.ndltd.org:tamu.edu/oai:repository.tamu.edu:1969.1/86041
Date10 October 2008
CreatorsOzkeskin, Fatih Mert
ContributorsHung, Wayne Nguyen P.
PublisherTexas A&M University
Source SetsTexas A and M University
Languageen_US
Detected LanguageEnglish
TypeBook, Thesis, Electronic Thesis, text
Formatelectronic, born digital

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