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Tribological study of micromachined electrostatically excited micromotors

No description available.
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:386464
Date January 1994
CreatorsBeerschwinger, Ulrich
PublisherHeriot-Watt University
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation
Sourcehttp://hdl.handle.net/10399/1381

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