This thesis describes the development, characterization andoptimization of compact, high-brightness, liquid-jet-targetx-ray sources. Two different source types have been developedfor different wavelength regions and applications. A laser-plasma source for generating soft x-ray andextreme-ultraviolet radiation has been further developed forsoft x-ray microscopy and extreme-ultraviolet lithography. Thiswork focused on improved target stability, increased conversionefficiency and decreased debris production. For x-raymicroscopy applications using carbon-containingliquid-jetdroplet targets, the droplet stability has beeninvestigated and a method for source stabilization introduced.This source has also been optimized in terms of flux per debriswith respect to target material and size. Forextreme-ultraviolet lithography applications, aliquid-xenon-jet-target laser-plasma source system has beengreatly improved, especially in terms of stability andconversion efficiency. This source has also been characterizedin terms of, e.g., source size, angular distribution, andrepetition-rate capability. For extremeultraviolet lithography,the possible use of tin as a target material has also beenstudied and conversion efficiency and debris measurementsperformed. A new anode concept for electron-impact hard x-ray sourcesbased on high-speed liquidmetal jets has been introduced.Initial calculations show that this new target concept couldpotentially allow more than a hundred-fold increase in sourcebrightness compared to existing state-of-the-art technology. Alow-power, proof-of-principle, experiment has been performed,verifying the basic source concept. Scaling tohigh-poweroperation is discussed and appears plausible. A main obstaclefor high-power operation, the generation of a microscopichigh-speed jet in vacuum, is investigated usingdynamic-similarity experiments and shown to be feasible.Finally, initial medium-power experiments, approaching currentstate-of-the-art sources in terms of brightness, have beenperformed.
| Identifer | oai:union.ndltd.org:UPSALLA1/oai:DiVA.org:kth-3716 |
| Date | January 2004 |
| Creators | Hemberg, Oscar |
| Publisher | KTH, Fysik, Stockholm : Fysik |
| Source Sets | DiVA Archive at Upsalla University |
| Language | English |
| Detected Language | English |
| Type | Doctoral thesis, comprehensive summary, info:eu-repo/semantics/doctoralThesis, text |
| Format | application/pdf |
| Rights | info:eu-repo/semantics/openAccess |
| Relation | Trita-FYS, 0280-316X ; 2004:4 |
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