This thesis presents analysis, design, implementation, and testing of electrostatically actuated MEMS microvalves. The microvalves are specifically designed for lab-on-a-chip applications to achieve leakage ratios below 0.1 at pressure levels in the order of 101 kPa.
For this purpose, two different microvalves are presented in the study. In the proposed designs, electrostatic actuation scheme is utilized to operate the microvalves in normally open and normally closed modes. Characterization of normally open microvalves show that, microvalves with radii ranging between
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| Identifer | oai:union.ndltd.org:METU/oai:etd.lib.metu.edu.tr:http://etd.lib.metu.edu.tr/upload/12613771/index.pdf |
| Date | 01 September 2011 |
| Creators | Yildirim, Ender |
| Contributors | Arikan, Sahir M. A. |
| Publisher | METU |
| Source Sets | Middle East Technical Univ. |
| Language | English |
| Detected Language | English |
| Type | Ph.D. Thesis |
| Format | text/pdf |
| Rights | To liberate the content for public access |
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