Integrating technology simulation into semiconductor manufacturing bridging the gap between TCAD and semiconductor manufacturing

Description

Zugl.: Wien, Techn. Univ., Diss., 2006 / Hergestellt on demand

Links & Downloads

1. http://d-nb.info/989578909/04

Tags

Halbleitertechnologie Entwurfsautomation

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/423729767
Date	January 2006
Creators	Minixhofer, Rainer
Publisher	Saarbrücken VDM Verlag Dr. Müller
Source Sets	OCLC
Language	English
Detected Language	English