Low temperature silicon epitaxy defects and electronic properties /

Description

University, Diss., 2003--Stuttgart.

Links & Downloads

1. http://elib.uni-stuttgart.de/opus/volltexte/2003/1483/index.html
2. http://deposit.d-nb.de/cgi-bin/dokserv?idn=968689035
3. http://elib.uni-stuttgart.de/opus/volltexte/2003/1483/pdf/diss_final.pdf

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/175162087
Creators	Wagner, Thomas.
Source Sets	OCLC
Language	English
Detected Language	English