Silicon carbide epitaxial growth using methylsilanes as gas sources

Description

Thesis (Ph. D.)--West Virginia University, 2004. / Title from document title page. Document formatted into pages; contains x, 119 p. : ill. Includes abstract. Includes bibliographical references (p. 108-114).

Links & Downloads

1. https://etd.wvu.edu/etd/controller.jsp?moduleName=documentdata&jsp%5FetdId=3613

Tags

Silicon-carbide thin films. Epitaxy.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/56801432
Date	January 1900
Creators	Peng, Charlie Y.
Publisher	Morgantown, W. Va. : [West Virginia University Libraries],
Source Sets	OCLC
Language	English
Detected Language	English