The thesis here presented is inspired on functionalized materials (magnetic sensitive stimuli materials (M-SSM) as well as the actuation principles (magnetic and photo-thermic) and material with tuneable magnetic and opto-thermal properties and on the fabrication techniques such as soft- , photolithography and inkjet printing techniques implemented in micro-opto-electro-mechanical systems (MOEMS). This thesis is focused on the development of MOEMS based on new polymeric functionalized materials. Concretely, PDMS cantilevers acting as VOA are achieved by obtaining M-SSMs based on PDMS and ferrofluid (FF). Additionally, light-sensitive materials based on SU-8 and color dyes are characterized and implemented in an all-polymer light actuated VOAs. Each of these systems is obtained with the most suitable technology, such as soft lithography, ink jet printing or UV-lithography and detailed information is presented throughout this work.
| Identifer | oai:union.ndltd.org:TDX_UAB/oai:www.tdx.cat:10803/330369 |
| Date | 18 December 2015 |
| Creators | de Pedro i Jordàn, Sandra |
| Contributors | LLobera Adán, Andreu, Cadarso Busto, Víctor Javier, Mompart Pepina, Jordi, Universitat Autònoma de Barcelona. Departament de Física |
| Publisher | Universitat Autònoma de Barcelona |
| Source Sets | Universitat Autònoma de Barcelona |
| Language | English |
| Detected Language | English |
| Type | info:eu-repo/semantics/doctoralThesis, info:eu-repo/semantics/publishedVersion |
| Format | 141 p., application/pdf |
| Source | TDX (Tesis Doctorals en Xarxa) |
| Rights | L'accés als continguts d'aquesta tesi queda condicionat a l'acceptació de les condicions d'ús establertes per la següent llicència Creative Commons: http://creativecommons.org/licenses/by-nc-nd/3.0/es/, info:eu-repo/semantics/openAccess |
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