Grazing incidence pumping (GRIP) is a scheme to produce x-ray lasers and
extreme ultraviolet lithography is a means of lithographic production which
requires soft x-rays with a bandwidth of 2% centred at 13,5 nm. In this work
firstly a grazing incidence pumping of Ni-like Mo and Ne-like Ti x-ray laser media
were simulated by using EHYBRID and a post-processor code coupled to it. The
required atomic data were obtained from the Cowan code. Besides, the timing
issue needed for amplification purpose in a Ti:Sapphire laser system has been
described theoretically. Afterwards, in order to produce soft x-ray lasers for
extreme ultraviolet lithographic applications, emission of soft x-rays in the 2%
bandwidth centred at 13.5 nm emitted from Sn XII and Sn XIII ions were
simulated by using the EHYBRID code for a laser operating at 1064 nm with 1 J
of pulse energy and 6 ns of pulse duration. The intensity range that has been
investigated is between 1-5 x 1012 W/cm2. Ion fractions of tin ions and line
intensities corresponding to different electron temperatures were calculated by
using the collisional radiative code NeF.
| Identifer | oai:union.ndltd.org:METU/oai:etd.lib.metu.edu.tr:http://etd.lib.metu.edu.tr/upload/12609743/index.pdf |
| Date | 01 July 2008 |
| Creators | Demir, Pinar |
| Contributors | Bilikmen, Sinan Kadri |
| Publisher | METU |
| Source Sets | Middle East Technical Univ. |
| Language | English |
| Detected Language | English |
| Type | Ph.D. Thesis |
| Format | text/pdf |
| Rights | To liberate the content for public access |
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