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A remote laboratory for testing microelectronic circuits on silicon wafers

This thesis explores the technical feasibilty of creating a remote laboratory in the field of microelectronics fabrication. It also includes the evaluation of the developed laboratory as a teaching tool. / PhDElectronicEngineering

Identiferoai:union.ndltd.org:ADTP/269033
Date January 2009
CreatorsMohtar, Aaron
Source SetsAustraliasian Digital Theses Program
LanguageEN-AUS
Detected LanguageEnglish
RightsCopyright Aaron Mohtar 2009

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