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A study of the performance and reliability characteristics of HfO₂ MOSFET's with polysilicon gate electrodes

Thesis (Ph. D.)--University of Texas at Austin, 2002. / Vita. Includes bibliographical references. Available also from UMI Company.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/56840655
Date January 2002
CreatorsOnishi, Katsunori.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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