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The effect of deposition conditions on the properties of RF sputtered silicon films

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:276099
Date January 1990
CreatorsQudah, Ali M. A.
PublisherUniversity of Reading
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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