This study developed a microfluidic flow sensor for the detections of velocity and viscosity, especially for ultra-low viscosity detection. An etched optic fiber with the diameter of 9 £gm is embedded in a microfluidic chip to couple green laser light into the microfluidic channel. The flow induced vibration causes periodic flapping motion of the optic fiber cantilever because of the pressure difference from two sides of fiber cantilever. Through the frequency analysis, the fluidic properties including the flow rate and the viscosity can be detected and identified. Results show that this developed sensor is capable of sensing liquid samples with the flow rates from 0.17 m/s to 68.81 m/s and the viscosities from 0.306 cP to 1.200 cP. In addition, air samples (0.0183 cP) with various flow rates can also be detected using the developed sensor. Although the detectable range for flow rate sensing is not wide, the sensitivity is high of up to around 3.667 mm/(s¡EHz) in test liquid in DI water, and when detecting air the sensitivity is 6.190 mm/(s¡EHz). The developed flow sensor provides a simple and straight forward method for sensing flow characteristics in a microfluidic channel.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0826111-154527 |
| Date | 26 August 2011 |
| Creators | Ju, Po-yau |
| Contributors | Che-Hsin Lin, Chien-Hsiung Tsai, Chien-Chou Tseng, Chia-Yen Lee, Lung-Min Fu |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0826111-154527 |
| Rights | user_define, Copyright information available at source archive |
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