Kinetic study on the production of silicon nitride by direct nitridation of silicon in a fluidized bed : experiment and modeling

Description

Graduation date: 1995

Links & Downloads

1. http://hdl.handle.net/1957/34894

Tags

Silicon nitride

Nitriding

Fluidization -- Mathematical models

Additional Fields

Identifer	oai:union.ndltd.org:ORGSU/oai:ir.library.oregonstate.edu:1957/34894
Date	30 August 1994
Creators	Jovanovic, Zoran R.
Contributors	Kimura, Shoichi
Source Sets	Oregon State University
Language	en_US
Detected Language	English
Type	Thesis/Dissertation