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Devices, materials and fabrication processes for integrated micro-systems /

Thesis (Ph. D.)--Lehigh University, 2003. / Includes vita. Includes bibliographical references (leaves 110-117).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/52640722
Date January 2002
CreatorsKarnik, Sooraj V.,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeAcademic dissertations

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