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Quality based scheduling for an example of semiconductor manufactory

Quality is an important measurement within a semiconductor manufactory. Due to the fact that yield is directly affected by quality of the manufacturing process, in this paper a quality based scheduling approach will be presented which compares different methods like dispatching, MIP and CP, regarding different objectives. To test the different used methods a benchmark model of a semiconductor manufactory is build up. Here a lithography work center is used in detail where the rest of the fabrication is only build up as a delay station. With this model the repeatability for the example of a lithography step is investigated. Thereby in this investigation it is assumed, that each lithography tool has an offset which is transferred to the structure. Now the quality of a product should be best, if the offset from one layer to the next layer is minimized.

Identiferoai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:74729
Date30 April 2021
CreatorsDoleschal, Dirk, Schöttler, Elisa Sophie
PublisherIEEE
Source SetsHochschulschriftenserver (HSSS) der SLUB Dresden
LanguageEnglish
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/updatedVersion, doc-type:conferenceObject, info:eu-repo/semantics/conferenceObject, doc-type:Collection
Rightsinfo:eu-repo/semantics/openAccess
Relation10.1109/WSC.2017.8248086, info:eu-repo/grantAgreement/European Commission/H2020 | ECSEL-IA/737459//Productive4.0/Electronics and ICT as enabler for digital industry and optimized supply chain management covering the entire product lifecycle

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