CVD and ALD of group IV- and V-Oxides for dielectric application /

Description

Diss. (sammanfattning) Uppsala : Univ., 2001. / Härtill 8 uppsatser.

Links & Downloads

1. http://publications.uu.se/theses/91-554-5143-8/

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/186077831
Date	January 1900
Creators	Forsgren, Katarina,
Publisher	Uppsala : Acta Universitatis Upsaliensis : Univ.-bibl. [distributör],
Source Sets	OCLC
Language	English
Detected Language	English