Surface dopant interactions in ultra-shallow junctions

Description

Techn. University, Diss., 2005--München.

Links & Downloads

1. http://deposit.d-nb.de/cgi-bin/dokserv?idn=979061350

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/615018997
Creators	Frühauf, Jens.
Source Sets	OCLC
Language	English
Detected Language	English