This work deals generally with surface diagnostic and optical properties of thin layers which are created by plasma polymerization of hexamethyldisiloxane monomer. The influence of oxygen adittion on thin layers properties was studied, too. This polymer layers are commercially made to protect reflective layers in the headlights. Thin layers were made in deposition chamber AluMet 1800V at Zlin Precision Company. Teoretical part of this work deals with methods which are used for deposition of thin layers, mainly physical (PVD) and chemical (PECVD, CVD) depositions. The conditions which influenced plasma polymerization itself are discussed as well as, monomers which are used for plasma polymerization and stability of thin polymer layers. Also there are mentioned the most frequent plasma processes diagnostic methods applicable during the deposition (optical emission spectroscopy) and methods for thin layers diagnostic (wettability, UV-VIS and infrared spectroscopy). Spectrometer Jobin Yvon Triax 320 was used for emission spectra acquisition during the plasma deposition. There were analyzed only two spectra created at same conditions as power at 3 kW and monomer flow rate at 100 sccm; the first one was in pure monomer, the second was obtained with oxygen addition of 150 sccm into the monomer flow. There was not found any essential differences between these spectra in the range 300 nm to 800 nm. Besides the thin layers analyzes after their formation, the samples were exposed to common aging conditions with respect to their use. One third of the prepared samples was exposed by ultraviolet radiation for 48 hours (exposure power of 0.68 W.m-2 at 340 nm) and the other part of samples was inserted for four days into NaCl solution of 50 g.l-1. The surface properties of layers were studied by their contact angle with three liquids (water, diiodmethane, and glycerol) that allowed their surface energy calculation. Results of this measuring are as following: Oxygen addition decreased contact angle of water after exposure of UV radiation. If the highest flow rate of monomer was used and oxygen was added, NaCl degradation did not have any significant influence on contact angle to water. Optical properties of prepared thin films were characterized by UV-VIS spectroscopy. Optical properties were measured only for samples after deposition and samples that were exposed by ultraviolet radiation. Results showed that oxygen addition into the reacting mixture increased the light absorption in UV-VIS (300-800 nm). The absorption was significantly increased after exposure of ultraviolet radiation. With respect to the application of these thin layers is necessary to say that this influence is undesirable. On the other hand, absorption of thin layers deposited at 2 kW, without oxygen addition and flow rate of monomer at 125 sccm a 150 sccm was decreased. Results of this work can be useful for investigation and study of deposited thin layers. The most useful can be with another work which deals with plasma diagnostics during the deposition even more closely. Then it will be possible to adjust and predict properties of deposited layers.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:216409 |
| Date | January 2008 |
| Creators | Stružínský, Ondřej |
| Contributors | Dzik, Petr, Krčma, František |
| Publisher | Vysoké učení technické v Brně. Fakulta chemická |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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