Inductively coupled plasma (ICP) is a promising low pressure, high density plasma source for material processing and is of great importance to modern plasma technology. This thesis summarizes the results of experimental study in a cylindrical ICP by using a single Langmuir probe (LP) and optical emission spectroscopy (OES). <p>The electron energy distribution function (EEDF), which contains important information of ICP plasma and is necessary for an accurate kinetic description of the low-pressure discharges, has been investigated with the Langmuir probe by using the alternating current (ac) method. Measurements were carried out in different gases including both atomic (argon, helium) and molecular (hydrogen, nitrogen) gases. The effects of the external discharge parameters such as gas pressure and radio frequency (rf) power have been investigated and the different mechanisms that influence the formation of the EEDF have been discussed. The radial dependence of the EEPF in the argon plasma has also been evaluated. <p>The average electron energy and electron density have also been obtained by direct measurement of the electron current-voltage (I-V) curve and the result is consistent with the power balance equation.<p> Optical emission spectroscopy has been used to study the importance of neutral gas heating in the ICP. The method used is based upon simulating and fitting the nitrogen emission band (the transition from,uCΠ30'=V to,gBΠ30"=V). Both nitrogen and argon plasmas have been studied separately and significant neutral heating has been found.
| Identifer | oai:union.ndltd.org:USASK/oai:usask.ca:etd-08292006-134121 |
| Date | 30 August 2006 |
| Creators | Li, Hong |
| Contributors | Hirose, Akira |
| Publisher | University of Saskatchewan |
| Source Sets | University of Saskatchewan Library |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://library.usask.ca/theses/available/etd-08292006-134121/ |
| Rights | unrestricted, I hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to University of Saskatchewan or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report. |
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