Regelungstechnische Analyse und Synthese von MEMS mit elektrostatischem Wirkprinzip Control engineered analysis and synthesis of MEMS with the electrostatic principle /

Description

Chemnitz, Techn. Univ., Diss., 2007. / Zugl. ersch. im Shaker Verl. Aachen, ISBN 978-3-8322-6348-5, - Parallelt.: Control engineered analysis and synthesis of MEMS with the electrostatic principle.

Links & Downloads

1. urn:nbn:de:swb:ch1-200701154

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/315290986
Date	January 2007
Creators	Wolfram, Heiko,
Publisher	[S.l. : s.n.],
Source Sets	OCLC
Language	German
Detected Language	English