The dissertation thesis deals with signal detection by an ionization detector in the environmental scanning electron microscope and utilization of this detector to gain required information in a specimen image. Main interest is focused on the detector containing several electrodes with a varied geometry arrangement and voltages on these electrodes. The detector was named segmental ionization detector. Detection capabilities of the segmental ionization detector were studied through computer simulations and experiments in the microscope utilizing knowledge from a technical literature background. On the base of the accomplished experiments, the segmental ionization detector has been optimized for the secondary electron detection improvement and at another configuration optimized for a high material contrast acquisition of the specimen image. Consideration of benefits of the examined segmental ionization detectors is included in the work.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:233435 |
| Date | January 2008 |
| Creators | Černoch, Pavel |
| Contributors | Jirák, Josef |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/doctoralThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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