This study uses the PIC (Particle-in-cell) method to simulate unsteady three-dimensional transport variables in argon plasma under low pressure and weak ionization between two planar electrodes suddenly biased by a negative voltage. Plasma has been widely used in etching, ion implantation, light source, and encountered in nuclear fusion, etc. Studying transport processes of plasmas therefore is important. This work ignores magnetic field, secondary electron emission, recombination between ions and electrons, and assumes a uniform distribution of the neutrals having velocity of a Maxwellian distribution. Accounting for elastic collisions between electrons and neutrals, ions and neutrals, and inelastic collisions resulting in ionization from impacting neutrals by electrons, and charge exchange between ions and neutrals, the computed results in this work quantitatively show non-isotropic pressures, shear stresses and heat conduction of the ions across the sheath to the surfaces suddenly biased by a dc negative voltage.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0809109-185508 |
| Date | 09 August 2009 |
| Creators | Huang, Chih-tsai |
| Contributors | Ming-San Lee, Fei-Bin Hsiao, Han-Taw Chen, Peng-sheng Wei, Jiin-Yuh Jang |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0809109-185508 |
| Rights | not_available, Copyright information available at source archive |
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