Statistical characterization and sensor based modeling and monitoring of fine abrasive, chamical mechanical polishing process

Description

Thesis (M. S.)--Oklahoma State University, 2006. / Vita. Includes bibliographical references.

Links & Downloads

1. http://digital.library.okstate.edu/etd/umi-okstate-1926.pdf

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/123246753
Date	January 2006
Creators	Rao, Prahalada Krishna
Source Sets	OCLC
Language	English
Detected Language	English