Intelligent control of critical dimensions in the semiconductor industry /

Description

Thesis (M.S.) in Electrical Engineering--University of Maine, 2001. / Includes vita. Includes bibliographical references (leaves 74-77).

Links & Downloads

1. http://www.library.umaine.edu/theses/theses.asp?Cmd=abstract&ID=EET2001-001

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/53165774
Date	January 2001
Creators	Khan, Shafaat Ahmed,
Source Sets	OCLC
Language	English
Detected Language	English