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Limits of resolution in cathode projection E-beam lithography

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:384307
Date January 1986
CreatorsAugur, R. A.
PublisherUniversity of Cambridge
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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