Automatic techniques for modeling impact of sub-wavelength lithography on transistors and interconnects and strategies for testing lithography induced defects

Description

Thesis (M.S.E.C.E.)--University of Massachusetts Amherst, 2008. / Includes bibliographical references (p. 68-72).

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1. http://scholarworks.umass.edu/theses/80/

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/232624910
Date	January 2008
Creators	Sreedhar, Aswin,
Source Sets	OCLC
Language	English
Detected Language	English
Source	Connect to this title online