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On the feasibility of integrated optical waveguide-based in-situ monitoring of microelectromechanical systems (MEMS)

Thesis (Ph. D.)--West Virginia University, 2000. / Title from document title page. Document formatted into pages; contains xiv, 198 p. : ill. (some col.). Vita. Includes abstract. Includes bibliographical references (p. 187-193).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/45807634
Date January 2000
CreatorsBrown, Kolin Shay.
PublisherMorgantown, W. Va. : [West Virginia University Libraries],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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