We present design and fabrication of ring cavity semiconductor lasers and single ring filter with simple fabrication processes. A 1.55-£gm symmetric quantum well InGaAlAs epi-layer wafer is used to fabricate the lasers. In device design, we apply loop mirror to obtain reflection instead of cleaved facet and take 1x2, and 2x2 Multi-Mode Interference (MMI) with different splitting ratio(50%:50%¡F15%:85%) as a coupler. Then we combine MMI couplers with ring cavities to control the output of specific wavelength. Therefore we can obtain filter and lasers with the property of wavelength selection.
We also design two kinds of special waveguides to achieve low reflectivity. One is a tapered spiral waveguide tail. The other waveguide is expanded in a curve and then cut off at the Brewster¡¦s angle. In loop mirror, two curvature radius(260,160£gm) were introduced to study bending loss and material loss. In single ring filter, we design two kinds of resonator lengths(1479,1385£gm) and the corresponding Free Spectrum Range (FSR) are 63.4, 67.75GHz, respectively.
In fabrication, owing to the unstable dry etch condition for InGaAlAs, we adopted multi-step etch technology. In the part of curved waveguide, we also use this method to make deep-etching to increase the difference of refractive index between waveguide and the outside part. Finally, we use the etch solution (HBr:HCl:H2O2:H2O=5:4:1:70) to smooth the sidewall of the waveguide, and to reduce scattering loss of the device.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0721105-162018 |
| Date | 21 July 2005 |
| Creators | Huang, Tzu-chien |
| Contributors | Tao-yuan Chang, San-liang Lee, Kuo-jui Lin, Tsong-sheng Lay, Ching-ting Lee |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0721105-162018 |
| Rights | not_available, Copyright information available at source archive |
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