The aim of this diploma thesis is to develop a linear positioning stage for Ultra High Vacuum (UHV) environment. Simple prototypes of the linear positioning stage were designed and incorporated as part of a multiaxis sample manipulator for a UHV Scanning Tunneling Microscopy / Atomic Force Microscopy (STM/AFM). Different types of position encoders and linear guideways are discussed. Implementation of the homodyne interferometer as an optimization tool for a slip-stick based linear stage is described. Scalar diffraction theory is used to model the diffraction grating optical position encoder behavior.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:229812 |
| Date | January 2011 |
| Creators | Pavelec, Jiří |
| Contributors | Jiruše, Jaroslav, Šikola, Tomáš |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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